A Route toward Ultrasensitive Layered Carbon Based Piezoresistive Sensors through Hierarchical Contact Design

摘要

Ultrahigh sensitive piezoresistive sensors at small deformation are highly desired in many applications. Here, we propose a hierarchical contact design concept and implement it through a direct laser writing technique for fabricating layered carbon piezoresistive sensors with ultrahigh sensitivity. Sensors with unprecedented gauge factors (similar to 5000-10 000) at small deformation (epsilon 0.1%) were successfully fabricated and demonstrated for their use in sensing both static and high-frequency (20-30 kHz) dynamic mechanical loads. A simple basic structure unit (BSU) contact network model was developed for understanding the importance of the BSU/BSU contact strength and network fractal dimension in dictating the piezoresistive sensitivity of the layered carbon piezoresistive sensors with designed hierarchical contact structures. The hierarchical contact design concept and the contact network model proposed in our work could, open a general route for developing ultrasensitive piezoresistive sensors based on granular matter and composite materials.