Femtosecond laser pulse ablation characteristics of polymer-derived SiAlCN ceramics

摘要

Polymer-derived ceramics (PDCs) are promising high-performance materials for various applications, yet their brittleness represents major drawback in their machining. Femtosecond laser pulse ablation is non-contact rapid processing method used in precision machining of PDCs. Herein, two laser parameters (laser energy fluence and rotational speed) were investigated to achieve laser-material interactions and machining characteristics via machine single circular lines, blind holes, and through-holes in polymer-derived SiAlCN ceramics. With the decrease in rotational speed, the morphology of single circular lines gradually roughened and heat-affected zone was produced. Varying ablation rates were obtained at different energy fluences. For blind holes, three different ablation regions were observed. As the energy fluence increased, blind holes gradually transformed into through-holes. Through-holes with near-cylindrical profiles and minimal collateral damage were obtained. Ablation debris deposited around through-holes were indicative of N release, breaking of Si-N and C-C bonds, and formation of SiOx. Laser ablation of PDCs led to the formation of laser-induced surface structures, bubble pits, stripe structures, molten materials, and sphere-like particles.