RF Integrated Inductor Using a Bidirectional Micro-patterned Magnetic Thin Film

摘要

Thin-film inductors with micro-patterned CoNbZr films for use as the impedance-matching elements in 1-GHz-drive mobile communication handsets were demonstrated. Intrinsic easy axis orientation at an angle of 45 degrees and micro-patterning enable the entire area of the magnetic film on the spiral to be used, because hard-axis excitation is possible in any part of the film. When a bidirectional film with a line and space of 10 #mu#m/1 #mu#m, the rf inductor exhibited an inductance of L = 8.2nH. This increase in inductance is twice as large than that in the same type of inductor using a uniaxial magnetic film.