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Direct Observation and Mechanism for Enhanced Electron Emission in Hydrogen Plasma-Treated Diamond Nanowire Films

机译:氢等离子体处理金刚石纳米线薄膜中增强电子发射的直接观察和机理

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The effect of hydrogen plasma treatment on the electrical conductivity and electron field emission (EFE) properties for diamond nanowire (DNW) films were systematically investigated. The DNW films were deposited on silicon substrate by N2-based microwave plasma-enhanced chemical vapor deposition process. Transmission electron microscopy depicted that DNW films mainly consist of wirelike diamond nanocrystals encased in a nanographitic sheath, which formed conduction channels for efficient electron transport and hence lead to excellent electrical conductivity and EFE properties for these films. Hydrogen plasma treatment initially enhanced the electrical conductivity and EFE properties of DNW films and then degraded with an increase in treatment time. Scanning tunneling spectroscopy in current imaging tunneling spectroscopy mode clearly shows significant increase in local emission sites in 10 min hydrogen plasma treated diamond nanowire (DNW10) films as compared to the pristine films that is ascribed to the formation of graphitic phase around the DNWs due to the hydrogen plasma treatment process. The degradation ,in EFE properties of extended (15 min) hydrogen plasma-treated DNW films was explained by the removal of nanographitic phase surrounding the DNWs. The EFE process of DNW10 films can be turned on at a low field of 4.2 V/pim and achieved a high EFE current density of 5.1 mA/ cm2 at an applied field of 8.S V/μm. Moreover, DNW10 films with high electrical conductivity of 216 (Q. cm)~(-1) overwhelm that of other kinds of UNCD films and will create a remarkable impact to diamond-based electronics.
机译:系统研究了氢等离子体处理对金刚石纳米线(DNW)薄膜的电导率和电子场发射(EFE)性能的影响。通过基于N2的微波等离子体增强化学气相沉积工艺将DNW膜沉积在硅基板上。透射电子显微镜显示,DNW薄膜主要由包裹在纳米石墨鞘中的线状金刚石纳米晶体组成,形成了有效电子传输的传导通道,因此为这些薄膜带来了极好的导电性和EFE性能。氢等离子体处理最初会增强DNW薄膜的电导率和EFE性能,然后随着处理时间的增加而退化。在当前成像隧道光谱模式下的扫描隧道光谱法清楚地表明,与原始膜相比,氢等离子体处理的金刚石纳米线(DNW10)膜在10分钟内的局部发射位点显着增加,这归因于DNW周围石墨相的形成。氢等离子体处理过程。延长(15分钟)氢等离子体处理的DNW薄膜在EFE性能上的降解可以通过去除DNW周围的纳米石墨相来解释。 DNW10薄膜的EFE工艺可以在4.2 V / pim的低电场下开启,在8.S V /μm的施加电场下可以达到5.1 mA / cm2的高EFE电流密度。此外,具有216(Q. cm)〜(-1)的高电导率的DNW10膜压倒了其他种类的UNCD膜,并将对基于金刚石的电子产品产生显着影响。

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