Structural peculiarities of 0.67 Pb(Mg1/3Nb2/3)O-3-0.33 PbTiO3 thin films grown directly on SrTiO3 substrates

摘要

Growth of Pb(Mg1/3Nb2/3)O-3-33PbTiO(3) thin films by pulsed-laser deposition directly on non-conductive SrTiO3 substrates for d(33)-mode energy harvesters (EHs) was studied, as they offer a higher figure-of-merit than d(31)-mode EHs. It was found that a high defect density, present in the film grown at 0.13 mbar, is manifested in the form of splitting of the (001) peaks in X-ray diffraction, which was avoided by raising the process pressure to 0.27 mbar. Nevertheless, both films grow in a combined 2D and 3D manner, and form out-of-phase boundaries (OPBs) with a PbO rock-salt structure between the as-grown islands. It was found that the overall composition of the sample with optimized structural and functional properties was Pb1.07Mg0.19Nb0.44Ti0.32O3, which is close to stoichiometric. The surplus of Pb is compensated by the formation of OPBs and Mg deficit maintains macroscopic electroneutrality. In-plane and out-of-plane relative permittivities of 1900 and 980, respectively, imply macroscopic out-of-plane polarization.