Consideration of Multi-Degree of Freedom Vibration on Large-Sized Gantry Type Linear Motor Slider

摘要

Many transport units for large production devices now incorporate large-sized gantry type linear motor sliders comprising two parallel linear sliders linked by a joint table. This type of linear motor slider develops a unique mechanical distortion, generating a repulsive force between the two axes that can raise the motor output forces higher than their rated limit. A previous study proposed a method to suppress the repulsive force. However, as feedback gains are set high, force references oscillate and the control system becomes unstable. In past study, yawing vibration suppression methods have been proposed. But, we consider that this vibration is not yawing vibration because the force references include same phase vibration with high gains. Therefore, the modal analysis is performed to analyze this vibration. As a result, it was found that the pitching vibration of the slider was greatly affected. This paper considers this vibration phenomenon, and suppression of the vibration by control method which is similar to impedance control is presented. Hence, it is shown that considering multidegree of freedom vibration which means yawing vibration and pitching vibration included is important in order to control the large-sized gantry type linear motor sliders.