IMPROVEMENT OF A CLASSICAL ELECTRODEPOSITION PROCESS FOR ELECTROSTATIC VARIABLE-CAPACITANCE, SIDE-DRIVE MICROMOTOR FABRICATION

摘要

An improvement of a classical electrodeposition process through a photoresist mold for electrostatic side-drive micromotor fabrication is proposed. A step of selective and quasi-conformal deposition is used to reduce the air gap and bearing clearance below the value allowed by the maximum photoresist aspect ratio. This will allow the fabrication of variable-capacitance micromotors with better operation characteristics. [References: 7]