Design and standalone characterisation of a capacitively coupled HV-CMOS sensor chip for the CLIC vertex detector

摘要

The concept of capacitive coupling between sensors and readout chips is under study for the vertex detector at the proposed high-energy CLIC electron positron collider. The CLICpix Capacitively Coupled Pixel Detector (C3PD) is an active High-Voltage CMOS sensor, designed to be capacitively coupled to the CLICpix2 readout chip. The chip is implemented in a commercial 180 nm HV-CMOS process and contains a matrix of 128 × 128 square pixels with 25 μm pitch. First prototypes have been produced with a standard resistivity of ~ 20 Ω cm for the substrate and tested in standalone mode. The results show a rise time of ~ 20 ns, charge gain of 190 mV/ke~ ? and ~ 40 e ~? RMS noise for a power consumption of 4.8 μW/pixel. The main design aspects, as well as standalone measurement results, are presented.