Properties of iodine containing diamond-like carbon films prepared by plasma source ion implantation

摘要

AbstractThe addition of halogens to diamond-like carbon (DLC) films provides attractive film properties, e.g. a hydrophobic surface combined with an improved corrosion protection. The use of iodine is of interest in this regard because of its additional marked influence on the band gap and therefore on the optical properties of the film. Instead of solid iodine, the gaseous precursor trifluoroiodomethane (CF3I) was used to prepare iodine containing DLC films. In contrast to our earlier experiments, a lower voltage was used in the plasma based preparation process thereby extending the iodine concentration range. The film properties, such as halogen content, bonding, water contact angle and corrosion protection were evaluated. The iodine containing DLC films are suitable to be deposited on polymer materials.Graphical abstractDisplay OmittedHighlights?Preparation of iodine containing diamond-like carbon films?Use of trifluoroiodomethane as precursor, combined with a lower pulse voltage in a plasma process?Successful deposition on nanostructured polymer substrates]]>