METHOD AND FACILITY FOR COATING THE 3-DIMENSIONAL MEMBER WITH DIAMOND-LIKE CARBON FILM BY PLASMA CVD COMBINED WITH PLASMA ION IMPLANTATION

摘要

A DLC(diamond-like carbon) coating method and a DLC coating apparatus which prevent shape or dimensions of a matrix from being changed, greatly improve interfacial adhesive force of a DLC film layer, enable a complicated shaped three-dimensional object to be coated to an uniform thickness, and make it not necessary to treat the surface of a DLC coated matrix or heat treat the DLC coated matrix are provided. In a method for modifying the surface of the matrix by plasma after injecting a gas material into a vacuum chamber in which a matrix is installed, a DLC(diamond-like carbon) coating method comprises: a cleaning step of cleaning the surface of the matrix with plasma generated using argon; a depositing step of forming a coating layer on the surface of the matrix by a plasma chemical vapor deposition method; an ion implanting step of implanting plasma ions into the coating layer formed matrix to form an ion mixed layer from a lower portion of the surface of the matrix to the coating layer; and a DLC coating step of forming a DLC film layer on the ion mixed layer by the plasma chemical vapor deposition method.