机译:用于微型机电系统的单晶金刚石悬臂
Xi An Jiao Tong Univ Inst Wide Band Gap Semicond Xian Peoples R China;
Xi An Jiao Tong Univ Inst Wide Band Gap Semicond Xian Peoples R China;
Xi An Jiao Tong Univ Inst Wide Band Gap Semicond Xian Peoples R China;
Xi An Jiao Tong Univ Inst Wide Band Gap Semicond Xian Peoples R China;
Xi An Jiao Tong Univ Inst Wide Band Gap Semicond Xian Peoples R China;
Xi An Jiao Tong Univ Inst Wide Band Gap Semicond Xian Peoples R China;
Xi An Jiao Tong Univ Inst Wide Band Gap Semicond Xian Peoples R China;
Xi An Jiao Tong Univ Inst Wide Band Gap Semicond Xian Peoples R China;
Xi An Jiao Tong Univ Inst Wide Band Gap Semicond Xian Peoples R China;
Xi An Jiao Tong Univ Inst Wide Band Gap Semicond Xian Peoples R China;
Xi An Jiao Tong Univ Inst Wide Band Gap Semicond Xian Peoples R China;
Single crystal diamond; Cantilever; Vertical switch; MEMS;
机译:用于微型机电系统的单晶金刚石悬臂
机译:批量生产用于微机电系统的单晶金刚石桥和悬臂
机译:Si(001)上用于微机电系统的Pb(Zr_(0.52)Ti_(0.48))O_3单晶薄膜的外延生长和电学测量
机译:微机电系统应用碳纳米管和纳米晶金刚石杂交种的同时合成
机译:在金刚石车削二元Cu-Ni合金系统时评估单晶金刚石工具的化学磨损。
机译:利用单晶金刚石悬臂梁制造电容式压力传感器
机译:使用单晶金刚石悬臂梁制造电容式压力传感器