Plasma states and carbon film deposition in glow discharge connected to dielectric barrier discharge

摘要

We developed a plasma source by connecting a direct current glow discharge (GD) with a dielectric barrier discharge (DBD) via a ground mesh (DB-GD). Based on the Langmuir probe measurements, the electron density of the DB-GD increased and the electron temperature decreased compared with those of the GD. Calculations of the electron energy distribution functions revealed that the DB-GD possessed a lower density of high-energy electrons and higher density of low-energy electrons than the GD did. We also confirmed that the DB-GD generated with methane gas was capable of producing an amorphous carbon film.