Parameters and properties of a pulsed planar vacuum magnetron discharge

摘要

We have developed a vacuum (gasless) magnetron discharge initiated by a vacuum arc plasma. The discharge operating conditions for different magnetron target materials have been determined. The mass-to-charge plasma composition and its evolution during a discharge current pulse were measured. It is shown that, after transient processes of cathode outgassing and purification, the plasma ion component consists mainly of singly-charged ions of the magnetron target material. The measured total ion current from the vacuum magnetron discharge plasma is up to 7.5% of the discharge current.