Generating plasma by magnetron, comprises supplying electrical energy in pulse form to magnetron, changing strength of electric field maintaining magnetron discharge, and changing strength of magnetic field penetrating through magnetron

摘要

The method comprises supplying an electrical energy in the form of pulses to a magnetron, changing the strength of an electric field maintaining a magnetron discharge with a first frequency, changing the strength of a magnetic field penetrating through the magnetron with a second frequency, adjusting the second frequency to 1-100 Hz, adjusting the maximum strength of the magnetic field to 5-times higher than the average strength of the magnetic field, and adjusting the first frequency to 100-times higher than the second frequency. A magnetron discharge voltage is generated by 200-2000 V. The method comprises supplying an electrical energy in the form of pulses to a magnetron, changing the strength of an electric field maintaining a magnetron discharge with a first frequency, changing the strength of a magnetic field penetrating through the magnetron with a second frequency, adjusting the second frequency to 1-100 Hz, adjusting the maximum strength of the magnetic field to 5-times higher than the average strength of the magnetic field, and adjusting the first frequency to 100-times higher than the second frequency. A magnetron discharge voltage is generated by 200-2000 V. The first frequency is increased to such an extent until during a rising edge of the magnetic field strength, a further electrical pulse is generated later after the ignition of a plasma when the value of the physical parameter characterizing the intensity of the plasma is dropped to 2% of its maximum value obtained during the previous electrical pulse. The magnetic field is periodically pulsed, in which a magnetic coil is subjected with a pulsed electric voltage, where the pulse-in-time is adjusted to 5-500 mu s in the electric pulses.