Process for installing and/or deinstalling a hollow/filled magnetic target on a cathode magnetron for cathodic pulverization, comprises generating a permanent magnetic field above the target for controlling a magnetron magnetic field

摘要

The process for installing and/or deinstalling a hollow/filled magnetic target (14) on a cathode magnetron (10) for cathodic pulverization, comprises generating a permanent magnetic field above the target for controlling a magnetron magnetic field. The permanent magnetic field is adapted with the cathode.