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An efficient material removal rate prediction model for cemented carbide inserts chemical mechanical polishing

机译:硬质合金碳化物的有效材料去除速率预测模型刀片刀片化学机械抛光

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摘要

Aiming at the defects of cemented carbide inserts surfaces produced in the conventional grinding process, a cemented carbide inserts chemical mechanical polishing (CMP) process is developed to reduce the insert rake face roughness for the improvement of cutting performance. Especially, an efficient material removal rate (MRR) prediction model for cemented carbide inserts CMP is established considering synthesized effects of multi-factors characteristics such as abrasive particles, the polishing pad, and cemented carbide inserts. Firstly, the contact mechanism between the cemented carbide insert and the polishing pad is analyzed by using the Greenwood and Williamson elastic model. Then the contact model between the abrasive particle and the polishing pad is established based on the Sneddon's hyper-elastic micro-contact mechanics, and the contact model between the abrasive particle and the cemented carbide insert is built by applying the elastic-plastic micro-contact mechanics. Finally, an efficient MRR prediction model is proposed. The experimental results show that when changing the polishing pressure and the polishing disk rotational speed individually, the MRR average error between the predicted value and the experimental value is 1.65% and 2.18%, respectively. This study demonstrates that the proposed model can contribute to CMP preparation of high-performance cemented carbide tools/inserts.
机译:针对碳化物碳化物刀片表面的缺陷,在传统研磨过程中产生的碳化物刀片,碳化物刀片刀片化学机械抛光(CMP)工艺开发为减少插入耙面粗糙度,以提高切割性能。特别地,考虑多因素特性,抛光垫和硬质合金刀片的多因素特性的合成效果建立了用于硬质合金碳化物插入CMP的有效材料去除率(MRR)预测模型。首先,通过使用Greenwood和Williamson弹性模型来分析硬质合金插入物和抛光垫之间的接触机构。然后基于Sneddon的超弹性微接触力学建立研磨颗粒和抛光垫之间的接触型号,并且通过施加弹性塑料微接触构建磨料颗粒和粘合碳化物插入物之间的接触模型力学。最后,提出了一种有效的MRR预测模型。实验结果表明,当单独改变抛光压力和抛光盘转速时,预测值与实验值之间的MRR平均误差分别为1.65%和2.18%。本研究表明,所提出的模型可以有助于CMP制备高性能硬质合金工具/插入件。

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