Impurity detection in polymer parts for the semiconductor manufacturing industry

摘要

The very strict purity requirements of polymer parts that are used in the semiconductor manufacturing industry lead to an excessively low yield rate. To decrease the costs in the production chain, detailed knowledge about possible impurities during each processing step is essential. This work provides an overview of non-destructive testing techniques that are capable of either detecting or even identifying these impurities. The most promising techniques were then combined in a semi-automatized laboratory demonstrator that can be used as an in-line diagnostics tool to prevent processing of faulty parts. Results from these measurements are presented and discussed.