Oblique-Angle Deposited SiO2/Al Omnidirectional Reflector for Enhancing the Performance of AlGaN-Based Ultraviolet Light-Emitting Diode

摘要

We report the improvement of the performance of AlGaN-based ultraviolet (UV)-light-emitting diodes (LEDs) using oblique-angle deposited SiO2-based omnidirectional reflectors (ODRs). The electron-beam (e-beam) deposition at angles of 60 degrees and 80 degrees resulted in the formation of porous SiO2 films. The refractive index (n) varied from 1.49 to 1.25 at 365 nm with changing angle from 0 to 80 degrees. Simulation based on the transfer matrix method showed that the porous SiO2 (n = 1.25)/Al ODR gave the normal incidence reflectance of 95.4% at 365 nm, whereas the conventional SiO2 (n = 1.49)/Al and ITO/Al reflectors have the normal incidence reflectance of 93.8% and 79%, respectively. The UV-LED with different reflectors had a forward voltage in the range of 3.40-3.51 V at 20 mA. The UV-LEDs with porous SiO2/Al ODRs (40% mesh ohmic area) yielded 21% higher light output at 100 mA and 24% relative external quantum efficiency (EQE) at 6 mA compared with the one with a reference ITO/Al reflector. The plan-view emission images showed that the SiO2/Al ODR UV-LED displayed better current spreading than the reference one with the ITO/Al reflector experiencing current crowding near the p-pad. (C) 2020 The Electrochemical Society ("ECS"). Published on behalf of ECS by IOP Publishing Limited.