MICROSTRUCTURE AND BLUE PHOTOLUMINESCENCE OF HYDROGENATED SILICON CARBONITRIDE THIN FILMS

摘要

Hydrogenated silicon carbonitride (SiCN:H) thin films were deposited by sputtering of silicon carbide target in hydrogen-doped argon and nitrogen atmospheres. The properties of the SiCN:H films were analyzed by scanning electron microscopy with energy dispersive spectrometer, atomic force microscope, Fourier transform infrared spectroscopy, X-ray diffraction and fluorescence spectrophotometer. No distinct crystal was formed in the SiCN:H films as-deposited and annealed at 600 degrees C and 800 degrees C. The SiCN:H films were mainly composed of Si-N, Si-C, Si-O, C-C, C-N,C N,N-H-n bonds and SiCxNy network structure. The strong blue photoluminescence observed from the SiCN:H film annealed at 600 degrees C was attributed to SiCxNy network structure.