Modified Van der Pauw Method of Measuring the Electrical Conductivity Tensor of Anisotropic Semiconductor Films

摘要

For a solution of the boundary electrodynamic problems, the paper proposes the original method of measuring the specific conductivity tensor components of anisotropic semiconductor square-shaped films. Ohmic and sensitive contacts are placed on the perimeter of the semiconductor film, in accordance with the Van der Pauw method more often used in practice. The derived equations are given in the form of polynomial dependencies of the anisotropy parameter. CdSb and CdAs2 single crystal semiconductors are used in the experiment.