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首页> 外文期刊>SID International Symposium: Digest of Technology Papers >ZnO Nanorods Array Fabricating on Conductive And Transparent Gallium-doped ZnO Substrates for Sensing Application in Display
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ZnO Nanorods Array Fabricating on Conductive And Transparent Gallium-doped ZnO Substrates for Sensing Application in Display

机译:ZnO纳米棒阵列在导电和透明镓掺杂ZnO基板上制造,用于在显示器中进行传感应用

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摘要

High transparent and conductive gallium-doped ZnO thin films, as an alternative material of ITO, were prepared on glass substrates by radio frequency magnetron sputtering, on which ZnO nanorods were fabricated with vertically array and controllable morphology. The ZnO nanorods exhibit highly potential for sensing application in the future display.
机译:通过射频磁控溅射在玻璃基板上制备高透明和导电镓掺杂的ZnO薄膜,作为ITO的替代材料,通过射频磁控管溅射在玻璃基板上制备,其中用垂直阵列和可控形态制造ZnO纳米棒。 ZnO Nanorods在未来显示中表现出感测应用的高潜力。

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