Computational Modeling of Silicon Nanoparticle Synthesis: II. A Two-Dimensional Bivariate Model for Silicon Nanoparticle Synthesis in a Laser-Driven Reactor Including Finite-Rate Coalescence

摘要

In this work, a two-dimensional model was developed for silicon nanoparticle synthesis by silane thermal decomposition in a six-way cross laser-driven aerosol reactor. This two-dimensional model incorporates fluid dynamics, laser heating, gas phase and surface phase chemical reactions, and aerosol dynamics, with particle transport and evolution by convection, diffusion, thermophoresis, nucleation, surface growth, coagulation, and coalescence processes. Because of the complexity of the problem at hand, the simulation was carried out via several sub-models. First, the chemically reacting flow inside the reactor was simulated in three dimensions in full geometric detail, but with no aerosol dynamics and with highly simplified chemistry. Second, the reaction zone was simulated using an axisymmetric two-dimensional CFD model, whose boundary conditions were obtained from the first step. Last, a two-dimensional aerosol dynamics model was used to study the silicon nanoparticle formation using more complete silane decomposition chemistry, together with the temperature and velocities extracted from the reaction zone CFD simulation. A bivariate model was used to describe the evolution of particle size and morphology. The aggregates were modeled by a moment method, assuming a log-normal distribution in particle volume. This was augmented by a single balance equation for primary particles that assumed locally equal number of primary particles per aggregate and fractal dimension. The model predicted the position and size at which the primary particle size is frozen in, and showed that increasing the peak temperature was a more effective means of improving particle yield than increasing silane concentration or flowrate.