Polymer-Assisted Pressure Sensor with Piezoresistive Suspended Graphene and Its Temperature Characteristics

摘要

A polymer-assisted pressure sensor with piezoresistive suspended graphene is proposed and fabricated with high yield. Our sensor exhibits a good pressure response comparable to that of commercial sensors. The sensitivity is estimated to be 2.87 x 10(-5) kPa(-1), higher than that of similar Si-based pressure sensors. The influence of the temperature on the sensor performance is systematically analyzed. An inverse temperature response is observed, and a nonnegligible temperature effect on the sensor resistance is demonstrated. Considering the temperature-induced cavity pressure change, a new temperature-resistance model is built to explain the nonlinearity of the sensor response to the temperature variation. Experiments under different test voltages show the influence of the current thermal effect, which is similar to that of temperature and nonnegligible for high-precision pressure sensors. Our new sensor holds great potential for practical application, and the findings on the temperature characteristics open up a route to further improve the sensor performance.