PID temperature control improvement of semiconductor furnace using fuzzy logic

摘要

In the semiconductor field, it becomes difficult to satisfy recent demands on the temperature control performance using a standard PID controller. Still more, to optimize a PID controller, much time is required for trial-and-error tuning. But simple and intuitive property of a PID con toroller is useful in production environment. We have developed a new method that improves PID controller performance, setting PID parameters for steady-state characteristic at first, and later compensating for transient characteristics. This paper describes an attempt to expand the applicable range of the PID controller using fizzy logic, and to reduce the effort for PID parameter tuning.