Low-voltage Sputtering Deposition of Transparent Conductive GAZO Thin Films for Minimizing Damage to Organic Layers

摘要

Organic electronics devices could have many advantages such as flexibility, simple process and low fabrication cost. Minimizing damage to organic layers during sputtering is important for the improvement of organic optoelectronic performance and lifetime. In order to achieve improved device performance, degradation of organic layers, which could be occurring during manufacturing, should be suppressed. Among the methods available for the fabrication of transparent electrodes, sputtering deposition possess many advantage over others, such as simple apparatus and procedure, high deposition rate, and wide deposition area. [1] Because of its unique structure, the use of a facing targets sputtering (FTS) system could effectively reduce damage during sputtering. [2] In this study, we prepared transparent, organic, GAZO thin films deposited onto Alq3 using an FTS system for the purpose of investigating the damage caused to organic layer by sputter deposition. To measure the damage sustained by organic materials during sputter deposition, we carried out depositions of transparent, conductive, gallium-aluminum doped Zinc Oxide (GAZO) thin films onto organic layers, using an FTS system.