TRANSPARENT CONDUCTIVE LAYER MADE BY AN ORGANIC METAL CHEMICAL VAPOR DEPOSITION METHOD PERIODICALLY INJECTING DOPANTS CAPABLE OF IMPROVING THE QUANTUM EFFICIENCY OF A THIN FILM SOLAR CELL

摘要

PURPOSE: A transparent conductive layer made by an organic metal chemical vapor deposition method is provided to remarkably reduce an amount of dopant materials by periodically injecting dopant materials into a reactor.;CONSTITUTION: Organic metal with zinc, gas with oxygen, gas with dopant elements, and organic metal with the dopant elements are injected into the reactor through additional lines. Gas with oxygen is selected among vapor, O2, CO2, and O3. The gas with the dopant element is diborane gas. The gas with dopant elements and the organic metal with the dopant elements are periodically injected to the reactor.;COPYRIGHT KIPO 2012