Metrological set-up for calibrating 2-dimensional grid plates with sub-micrometre precision

摘要

Calibration, performance verification and error correction of two dimensional (2D) optical metrology instruments, such as profile projectors, microscopes and "vision" systems are commonly carried out with the aid of calibrated 2D high-precision optical grid plates. This paper presents a high resolution 2D measurement instrument that has been developed for calibrating such grid-plates up to 300 mm x 200 mm in size and providing sub-micrometre measurement uncertainties. This instrument was specifically designed by the laboratory to ensure their calibration capabilities aligned with both the customers' technical requirements along with their budgets and expectations too. (C) 2018 Elsevier Ltd. All rights reserved.