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首页> 外文期刊>Materials science in semiconductor processing >Structural, optical and photoresponse characteristics of metal-insulator-semiconductor (MIS) type Au/Ni/CeO2/GaN Schottky barrier ultraviolet photodetector
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Structural, optical and photoresponse characteristics of metal-insulator-semiconductor (MIS) type Au/Ni/CeO2/GaN Schottky barrier ultraviolet photodetector

机译:金属绝缘体 - 半导体(MIS)型Au / Ni / Ceo2 / GaN肖特基屏障紫外光探测器的结构,光学和光响应特性

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摘要

GaN based metal-insulator-semiconductor (MIS) type ultraviolet photodetector was fabricated and investigated using high-k dielectric CeO2 as an insulating oxide layer. Using XRD analysis, the phase formation of the asdeposited CeO2 films on GaN was found to be cubic fluorite. Non-contact mode atomic force microscopy technique was utilized and explored the surface morphology of CeO2 films on GaN composed of prearranged clusters of spherical shape with an average rms surface roughness of 0.428 mu m. XPS analysis has revealed the existence of two oxidation states such as Ce3+ and Ce4+ in the Ce3d spectral envelop. Using absorbance versus wavelength data, the Tauc's plot was plotted and calculated a direct optical bandgap of 3.52 eV. The current-voltage (I-V) characteristics extracted from the device revealed the symmetric behavior or formation of back-to-back Schottky barrier at the metal-semiconductor (MS) interface. Photoresponsivity of the device at +10 V bias was calculated as 28.99 A/W and it is higher compared to the values extracted from metal-semiconductor-metal (MSM) type UV PDs reported in the literature. Furthermore, the transient response characteristics of the prepared device showed good stability with almost same rise time and fall time of similar to 2.73 s and similar to 5.35 s, respectively. Based on the device performance, the proposed MIS type structure could be a suitable for the development of ultraviolet photodetectors.
机译:GaN基金属 - 绝缘体 - 半导体(MIS)型紫外线光电探测器由作为绝缘氧化物层的高k电介质CeO2进行制造和研究。使用XRD分析,发现GaN上的嵌入式CEO2薄膜的相位形成是立方萤石。利用非接触模式原子力显微镜技术,并探讨了由平均rms表面粗糙度为0.428μm的Prearranged球形簇组成的CeO2薄膜的表面形态。 XPS分析揭示了CE3D光谱包络中的两个氧化状态,例如CE3 +和CE4 +。使用吸光度与波长数据,绘制了Tauc的绘图,并计算了3.52eV的直接光学带隙。从装置中提取的电流电压(I-V)特性揭示了在金属半导体(MS)界面处的反向肖特基屏障的对称行为或形成。将装置的光响应性计算为28.99A / W,与文献中报道的金属半导体 - 金属(MSM)型UV PD中提取的值更高。此外,制备装置的瞬态响应特性显示出良好的稳定性,几乎相同的上升时间和下降时间分别与2.73s且类似于5.35秒。基于器件性能,所提出的MIS型结构可能是适合于紫外线光电探测器的开发的一种。

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