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Structural and electrical properties of pulsed laser deposited BaPbO3 conductive thin films and its effect on the ferroelectric properties of PbZr0.52Ti0.48O3/BaPbO3 heterostructures

机译:脉冲激光沉积的Bapbo3导电薄膜的结构和电性能及其对PBZR0.52TI0.48O3 / BAPBO3异质结构的铁电性能的影响

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摘要

BaPbO3 (BPO) thin films of different thickness were deposited by pulsed laser deposition on p type Si/SiO2 substrates. The influence of film thickness on the structural and electrical properties is studied. It is found that the BPO thin films of 300 nm has good crystallinity and grain size of 21nm. The carrier mobility increases with film thickness for films above 150 nm due to the ordered structure resulting in large grain size and small number of boundaries which enhances charge transport.
机译:通过P型Si / SiO 2基板上的脉冲激光沉积沉积不同厚度的BAPBO3(BPO)薄膜。 研究了膜厚度对结构和电性能的影响。 结果发现,300nm的BPO薄膜具有良好的结晶度和晶粒尺寸为21nm。 由于有序的结构导致增加电荷运输的粒度和少量边界,载流子迁移率随着150nm以上的薄膜薄膜薄膜厚度增加而增加。

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