Thermal Conductivity Measurement of Soda-Lime-Silica Glass by Transient 3 omega Method with Au Thin Film-Based Micro-heater/Temperature Sensor Fabricated by an Innovative Approach

摘要

Present work reports thermal conductivity measurement in a commercial soda-lime-silica glass substrate by the transient 3 omega method using a unique, custom-built in-house setup. Most importantly, a micro-heater (MH) cum temperature sensor is fabricated for this purpose. At first the MH-patterned mask is developed by CO2 laser cutting technique on quartz glass. The MH (L-5 mm, W-65-70 mu m, t-140 nm) is fabricated by sputtered Au thin film on the commercial soda-lime-silica glass substrate. Following evaluations of the thermo-electrical properties, microstructure and surface morphology of the Au thin film, the TCR of the MH is noted to be 0.001469 K-1. Finally, the thermal conductivity of the soda-lime-silica glass substrate is measured as 1.46 W center dot m(-1)center dot K-1. The error in measurement calculated by the Kline-McClintock method is < 7 %.