Piezoelectric Aluminum Nitride Micro Electromechanical System Resonator for RF Application

摘要

This paper presents the design and the finite element analysis of one port piezoelectrically transduced micro electromechanical system resonator based on the contour mode vibrations (CMV) on lateral field excitation (LFE) suitable for high frequency (～2.28GHz) application with high quality factor 1600. The piezoelectric material, aluminum nitride (AlN) has been used to achieve high frequency-quality factor (f.Q) product for radio frequency (RF) applications as an oscillator and/or filter part of RF transceiver. Furthermore, this piezoelectric material accounts for high acoustic velocity and low dielectric loss. Along with material solution, the device dimensions have been scaled both in lateral and vertical directions in order to increase the frequency of operation with a relatively small value of motional resistance. Mode shape and frequency of the device has been confirmed by the analytical method and the statistical data evaluated is used to simulate the design. Fabrication procedure of the statistically optimized & simulated structure with only two level electron beam lithography is also proposed.