HIGH PRECISION SEMICONDUCTOR DEVICES USING NANO-STENCIL LITHOGRAPHY

摘要

Nano-stenciling is a patterning technique in which a selective area on a surface gets patterned in a single step, by depositing material through a stencil. Advancements in nanoscale patterning techniques are being made in order to comply with novel organic materials and topographically-rich thermally-sensitive substrates. Researchers are determined to further develop stenciling technologies by creating a nano-stenciling methodology for nonconventional substrates and are focusing on improving the resolution and reliability of the deposited patterns, which are smaller than 100 nm.