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Improvement in machining accuracy of micro-dimples fabricated in a sandwich-like electrochemical micromachining unit using a porous cathode

机译:使用多孔阴极在夹层电化学微机械单元中制造的微空的加工精度的改进

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摘要

Surface texture plays a significant role in improving interfacial performance of mechanical components. Electrochemical micromachining is a feasible method for preparing micro-dimples. Sandwich-like electrochemical micromachining (SLEMM) could be used for generating micro-dimples, in which the cathodic tool keeps in close contact with the mask firmly laminated to the anodic workpiece surface, and the dissolution of the workpiece takes place in the enclosed unit. The shallow micro-dimples could be machined with the electrolytic products accumulating on the workpiece surface in the enclosed unit of SLEMM. A porous metal cathode was employed in SLEMM resulting in an open unit, which could remove electrolytic products and generate deep micro-dimples. However, there is poor machining accuracy of micro-dimples obtained with stationary electrolyte over the porous cathode. Pulse electrochemical micromachining is an effective method for enhancing the machining accuracy of micro-dimples. Therefore, the pulse is applied to improve the machining accuracy of micro-dimples generated in SLEMM with a porous metal cathode. And the different electrolyte flow modes over the porous metal cathode are employed to investigate their influence on machining accuracy of micro-dimples. The experimental results indicate that the pulse current power supply could improve the machining accuracy of micro-dimples, compared with direct current power supply. Furthermore, the machining accuracy of micro-dimples could be improved by lateral flow mode, compared with radial flow mode. With a 40% pulse duty ratio, 4?kHz pulse frequency, 15?V applied voltage, and 6?s effective machining time, the micro-dimples have a good machining accuracy on multiple anodic workpieces.
机译:表面纹理在提高机械部件的界面性能方面起着重要作用。电化学微机械是一种制备微凹坑的可行方法。夹层电化学微机械线(SLEMM)可用于产生微凹槽,其中阴极工具与牢固地层压到阳极工件表面的掩模保持紧密接触,并且在封闭的单元中进行工件的溶解。浅微芯片可以用积聚在封闭单元的SLEMM中的工件表面上的电解产物加工。在SLEMM中使用多孔金属阴极,导致开放单元,其可以去除电解产物并产生深微凹坑。然而,在多孔阴极上用固定电解质获得的微脉冲加工精度差。脉冲电化学微机械是一种有效的方法,用于增强微凹坑的加工精度。因此,施加脉冲以提高用多孔金属阴极在秒筒中产生的微脉冲的加工精度。并且采用多孔金属阴极上的不同电解质流动模式来研究其对微脉冲加工精度的影响。实验结果表明,与直流电源相比,脉冲电流电源可以提高微凹坑的加工精度。此外,与径向流动模式相比,通过横向流动模式可以提高微脉冲的加工精度。具有40%的脉冲占空比,4?kHz脉冲频率,15?V施加电压和6?S的有效加工时间,微凹槽在多个阳极工件上具有良好的加工精度。

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