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Investigation of structural and optical properties of ZnO thin films of different thickness grown by pulsed laser deposition method

机译:脉冲激光沉积法生长不同厚度ZnO薄膜结构和光学性能的研究

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摘要

In this paper, we investigated the effect of film thickness on structural, surface morphology and optical properties of ZnO thin films grown by pulsed laser deposition (PLD) method. Thickness of the films was varied by keeping all other PLD parameters same to investigate thickness dependence on the structural and optical properties of ZnO thin films. The prepared thin films have been characterized by X-ray diffraction (XRD), atomic force microscopy (AFM), UV- visible (Uv-Vis) and photoluminescence (PL) spectroscopy. XRD confirms the formation of crystalline c-axis orientated hexagonal wurtzite structure of ZnO thin films. AFM depicts that roughness and grain size of the ZnO films increase with increase in the films thickness. The direct optical band gap of the ZnO films calculated using Tauc's plot increase from 3.28 eV to 3.34 eV as the thickness of the films varies from 55 nm to 220 nm. The high quality c-axis orientated ZnO thin films with minimum strain and tuneable optical properties could be used as a transparent conducting oxide (TCO) for optoelectronic applications.
机译:在本文中,我们研究了膜厚度对由脉冲激光沉积(PLD)方法生长的ZnO薄膜结构,表面形态和光学性质的影响。通过保持所有其他PLD参数来改变膜的厚度,以研究厚度依赖性对ZnO薄膜的结构和光学性质的厚度。制备的薄膜的特征在于X射线衍射(XRD),原子力显微镜(AFM),UV可见(UV-VI)和光致发光(PL)光谱。 XRD证实了ZnO薄膜结晶C轴取向六方紫立茨结构的形成。 AFM描绘了ZnO膜的粗糙度和晶粒尺寸随着薄膜厚度的增加而增加。随着薄膜的厚度从3.28eV增加到3.34eV,使用Tauc的曲线增加的ZnO膜的直接光带隙随着薄膜的厚度从55nm到220nm而变化。具有最小应变和可调谐光学性能的高质量C轴取向ZnO薄膜可用作光电应用的透明导电氧化物(TCO)。

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