3D piezoresistive silicon microprobes with stacked suspensions for tailored mechanical anisotropies

摘要

Highlights?A detailed FEM and experimental analysis of the influence of geometric parameters on the mechanical stiffness of different microprobes.?A reliable prediction and tailoring of the anisotropy of different microprobes.?A reliable fabrication process of the metal/silicon stacked suspensions including wafer level assembly of metal foils and silicon substrates.?A reliable fabrication process of the metal/silicon stacked suspensions including wafer level assembly of metal foils and silicon substrates.AbstractDifferent kinds of piezoresistive microprobes based on silicon have been developed to enable measurement with high accuracies. However, the typical mechanical anisotropy of such systems leads to the slip of the tip, when probing inclined surfaces. Here, a novel microprobe design is presented, which can be tailored to provide a range of anisotropy or even a perfect isotropy. In the first appro