Development of a wireless and passive temperature-compensated SAW strain sensor

摘要

A temperature-compensated surface acoustic wave (SAW) device was developed to build a wireless and passive strain sensor. Y-cut 35 degrees X quartz with perfect temperature stability was employed as the piezoelectric substrate of the sensing device patterned by one-port resonator. Optimization by coupling of modes (COM) model towards sensing chip was conducted to determine the optimal design parameters, which offers lager Q-value. The prepared sensing device by standard photolithographic technique operating at 434MHz was characterized wirelessly. High strain sensitivity, excellent temperature stability, and high resolution were achieved in the wireless measurements. (C) 2020 Elsevier B.V. All rights reserved.