机译:使用超小型Gabtie孔径的16个NM分辨率光刻
Univ Sci &
Technol China Micro &
Nano Engn Lab Hefei 230026 Anhui Peoples R China;
Univ Sci &
Technol China Anhui Key Lab Optoelect Sci &
Technol Dept Opt &
Opt Engn Hefei 230026 Anhui Peoples R China;
Univ Sci &
Technol China Micro &
Nano Engn Lab Hefei 230026 Anhui Peoples R China;
Univ Sci &
Technol China Anhui Key Lab Optoelect Sci &
Technol Dept Opt &
Opt Engn Hefei 230026 Anhui Peoples R China;
Univ Sci &
Technol China Micro &
Nano Engn Lab Hefei 230026 Anhui Peoples R China;
Univ Sci &
Technol China Micro &
Nano Engn Lab Hefei 230026 Anhui Peoples R China;
Purdue Univ Sch Mech Engn W Lafayette IN 47907 USA;
Univ Sci &
Technol China Anhui Key Lab Optoelect Sci &
Technol Dept Opt &
Opt Engn Hefei 230026 Anhui Peoples R China;
near-field lithography; nanofabrication; localized surface plasmon; nanofocusing; passive flexure stage;
机译:使用超小型Gabtie孔径的16个NM分辨率光刻
机译:使用超小间隙尺寸的纳米蝶形孔进行近场扫描光刻的数值和实验研究
机译:通过在近场扫描大量的领结孔径天线阵列进行高通量光刻
机译:16nm分辨率使用超小间隙蝴蝶结孔径
机译:微波和光频率下的Bowtie和Bowtie孔径天线。
机译:通过在近场扫描大量的领结孔径天线阵列进行高通量光刻
机译:通过在近场扫描大量的蝴蝶结孔径天线来进行高通量光学光刻