机译:HFO2封装对少数层MOS2晶体管电气性能的影响,用ALD HFO2作为背栅电介质
Huazhong Univ Sci &
Technol Sch Opt &
Elect Informat Wuhan 430074 Peoples R China;
Huazhong Univ Sci &
Technol Sch Opt &
Elect Informat Wuhan 430074 Peoples R China;
Huazhong Univ Sci &
Technol Sch Opt &
Elect Informat Wuhan 430074 Peoples R China;
Huazhong Univ Sci &
Technol Sch Opt &
Elect Informat Wuhan 430074 Peoples R China;
Huazhong Univ Sci &
Technol Sch Opt &
Elect Informat Wuhan 430074 Peoples R China;
Univ Hong Kong Dept Elect &
Elect Engn Pokfulam Rd Hong Kong Hong Kong Peoples R China;
Hong Kong Polytech Univ Dept Appl Phys Kowloon Hong Kong Peoples R China;
few-layered MoS2; field-effect transistors (FET); high-k dielectric screening; high-k encapsulation;
机译:HFO2封装对少数层MOS2晶体管电气性能的影响,用ALD HFO2作为背栅电介质
机译:近乎理想的亚阈值摆动MOS2背栅晶体管,具有优化的超薄HFO2介电层
机译:用NH3 - 血浆处理的HFO2改进顶部栅极MOS2晶体管的电性能作为栅极电介质
机译:用于高级MIS电容器的超薄HfO2 / Al2O3 / HfO2三层栅极电介质的电气特性
机译:高k HfO2栅介质的射频溅射ZnO薄膜晶体管制造条件的优化。
机译:CF4等离子体处理HfO2栅电介质的非晶铟镓锌氧化物薄膜晶体管的电性能和可靠性提高
机译:退火对原子层沉积HfO2栅介质的多层MoS2晶体管电性能的影响
机译:激光调节和激光损伤的HfO2 / siO2介电镜涂层的原位原子力显微镜。