Optical, Structural and Gas Sensing Studies on Tin Oxide Thin Films

摘要

In this paper, pure and copper doped tin oxide thin films were grown on glass substrates by thermal evaporation technique for gas sensing applications. Optical, structural and gas sensing properties were investigated for their application for gas sensing applications. The thickness of the samples was kept about 300 nm. The films were annealed at 400 °C for 4 h in the presence of air. The gas sensing studies were carried out for hydrogen sulphide and ethanol gas. The sensitivity was quite high for hydrogen sulphide gas but little sensitivity towards hydrocarbon gases.