Determination of electron energy distribution function shape for non-Maxwellian plasmas using floating harmonics method

摘要

A new floating harmonics method is developed to determine the electron energy distribution shape in the non-Maxwellian plasmas. The slope and curvature of the electron energy probability function (EEPF) at the floating potential can be obtained by measuring amplitude ratios among the first three sideband harmonics of the probe electron current. Together with the generalized EEPF formula, the EEPF shapes of the non-Maxwellian plasmas are able to be determined from the slope and curvature. Here, the new method is experimentally verified and its results are compared with EEPF measurements using the Langmuir probe (LP) method. The effective electron temperature and the EEPF shape parameter obtained by the method give good agreements with those of the LP measurements.