METHOD FOR DIAGNOSING ELECTRON ENERGY DISTRIBUTION FUNCTION OF PLASMA AND METHOD FOR MONITORING THEREOF

摘要

A method of diagnosing an EEDF of a plasma according to an embodiment of the present invention is a method of diagnosing an electron energy distribution function (EEDF) of a plasma, comprising the steps of: (a) Selecting an EEDF function expression of the plasma; (b) establishing a wavelength selection and light emission model based on the properties of the excitation physical properties; And (c) measuring the EEDF based on the established light emission model.