Axial uniformity of diamond-like carbon film deposited on metal rod by using microwave-sheath voltage combination plasma

摘要

We developed a novel method for the deposition of diamond-like carbon (DLC) films at high deposition rates (over 100 μm/h) usingmicrowave-sheath voltage combination plasma. Thismethod was applied for depositing a DLC film on a three-dimensional metal substrate, but we found that the film thickness was not uniform along the direction of microwave propagation. Hence, we investigated the factors affecting the axial uniformity of DLC film deposited on longmetal rods (1 cm in diameter). Since the axial distribution of plasma was observed to affect the uniformity of DLC,we evaluated the axial distribution of ion density using a Langmuir Probe in Ar plasma that was generated along both DLC-coated and non-coated rods. The results showed that the ion density along the axis of the DLC-coated rod decayed at a shorter distance than that along the axis of the uncoated one. The voltage of the ion sheath presumably decreased owing to the voltage drop in the DLC filmwith high resistivity, in accordance with the short microwave decay. The uniformity considerably improved by using a duty ratio of 50% for the pulsed operation of both the microwaves and the substrate bias at-200 V.When the substrate voltage was increased to-500 V, the hardness of the DLC film measured by the nano-indenterwas about 25 GPa, uniformly distributed along the rod axis. Raman results showthat the film is typical DLC structure, and the structure shows good uniformity along the rod axis.