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Correlation between Substrate Ion Fluxes and the Properties of Diamond-Like Carbon Films Deposited by Deep Oscillation Magnetron Sputtering in Ar and Ar + Ne Plasmas

机译：基底离子磁通与AR和AR +鼻等离子体深振荡磁控溅射沉积的金刚石状碳膜的性质的相关性

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João Oliveira; Fábio Ferreira; Ricardo Serra; Tomas Kubart; Catalin Vitelaru; Albano Cavaleiro;
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1. Correlation between Substrate Ion Fluxes and the Properties of Diamond-Like Carbon Films Deposited by Deep Oscillation Magnetron Sputtering in Ar and Ar Ne Plasmas [J] . Jo?o Oliveira, Fábio Ferreira, Ricardo Serra, Coatings . 2020,第10期

机译：基板离子通量与深振荡磁控溅射沉积的金刚石状碳膜的性质相关性
2. Diamond-like carbon coatings deposited by deep oscillation magnetron sputtering in Ar-Ne discharges [J] . Ferreira Fabio, Serra Ricardo, Cavaleiro Albano, Diamond and Related Materials . 2019,第期

机译：在AR-NE放电中由深振荡磁控溅射沉积的金刚石状碳涂层
3. Preparation of diamond-like carbon films using reactive Ar/CH4 high power impulse magnetron sputtering system with negative pulse voltage source for substrate [J] . Kimura Takashi, Kamata Hikaru Japanese journal of applied physics . 2016,第4期

机译：使用带负脉冲电压源的反应性Ar / CH4大功率脉冲磁控溅射系统制备类金刚石碳膜
4. Structural characterization of zinc oxide thin films deposited at various O2/Ar flow ratio in magnetron sputtering plasma [C] . Nayan Nafarizal, Shuhana C.T., Ahmad Riyaz, IEEE Regional Symposium on Micro and Nano Electronics . 2013

机译：磁控溅射等离子体中不同O2 / Ar流量比沉积的氧化锌薄膜的结构表征
5. Process-Properties Relations in Deep Oscillation Magnetron Sputtering [D] . Ferreira, Fábio Emanuel de Sousa. 2018

机译：深振荡磁控溅射中的过程-性能关系
6. Substrate Temperature Dependent Microstructure and Electron-Induced Secondary Electron Emission Properties of Magnetron Sputter-Deposited Amorphous Carbon Films [O] . Jie Li, Xingkang Yi, Wenbo Hu, 2019

机译：磁控溅射沉积非晶碳膜的基体温度相关的微观结构和电子诱导的二次电子发射特性
7. Mechanical Properties of Hydrogen Free Diamond-Like Carbon Thin Films Deposited by High Power Impulse Magnetron Sputtering with Ne [O] . Asim Aijaz, Fabio Ferreira, Joao Oliveira, 2018

机译：高功率脉冲磁控溅射沉积的无氢金刚石状碳薄膜的机械性能

Correlation between Substrate Ion Fluxes and the Properties of Diamond-Like Carbon Films Deposited by Deep Oscillation Magnetron Sputtering in Ar and Ar + Ne Plasmas

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