Radiotracer study of cobalt diffusion and solubility in electronic-grade germanium wafers

摘要

The diffusion rate of Co in Ge is found to be as fast as 2 x 10(-6)cm(2)s(-1) at 90 degrees C, whereas the Co solubility comes close to 1 x 10(16) cm(-3) at the same temperature. Based on these properties and its acceptor activity, Co may cause serious contamination problems during the fabrication of Ge-based electronic devices. In contrast to an early radiotracer study [L.Y. Wei, J. Phys. Chem. Solids 18 (1961) 162], we observe common diffusion profiles of complementary error function type, which are indicative of a constant diffusivity depending only on temperature. A preliminary analysis of the data points to the dissociative diffusion mechanism involving interstitial-substitutional exchange via vacancies. However, in contrast to Cu, which migrates via the vacancy-controlled mode of the dissociative mechanism, the diffusion of Co may be rate-limited by the transport properties of its interstitial modification (Co-i). (C) 2007 Elsevier B.V. All rights reserved.