Si/Sb superlattice-like thin films for ultrafast and low power phase change memory application

摘要

After compositing with Si, the superlattice-like (SLL) Si/Sb thin film had higher crystallization temperature (similar to 231 degrees C), larger crystallization activation energy (2.95 eV), and better data retention ability (126 degrees C for 10 years). The crystallization of Sb in SLL Si/Sb thin films was restrained by the multilayer interfaces. The reversible resistance transition could be achieved by an electric pulse as short as 10 ns for [Si(22 nm)/Sb(2 nm)](2)-based PCM cell. A lower operation power consumption of 0.02 mW and a good endurance of 1.0 x 10(5) cycles were achieved. In addition, SLL [Si(22 nm)/Sb(2 nm)](2) thin film showed a low thermal conductivity of 0.11 W/(m.K). (C) 2016 Elsevier B.V. All rights reserved.