Fabrication of plasmonic devices using femtosecond laser-induced forward transfer technique

摘要

Using femtosecond laser-induced forward transfer techniques we have fabricated gold dots and nanoparticles on glass substrates, as well as nanobumps on gold thin film. The surface morphologies of these structures with different laser fluences and film thicknesses are investigated. We also study the focusing and defocusing properties of the nanofence - an arranged nanobump pattern - by the total-internal reflection microscope. Observations reveal that surface plasmon waves can be highly directed and focused via this nanofence pattern. Results are in good agreement with the simulation results using the finite-element method and demonstrate the potential applications of these nanophotonic devices. Furthermore, we utilize high laser energy to fabricate plasmonic waveguides, and also succeed in transferring the waveguides to another substrate. The attenuation rates of the light propagating in the waveguides are observed to achieve 0.31dBμm ~1 and 0.48dBμm ~1 on the target and receiver sides, respectively.