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Design of a flat field concave-grating-based micro-Raman spectrometer for environmental applications

机译:用于环境应用的基于平场凹栅的微拉曼光谱仪的设计

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摘要

In order to simplify the design process of microfabricated concave gratings, simplified algorithms for fast characterization of the concave grating were developed. These algorithms can be used to assist system designers using ray-tracing software in the determination of optimum design parameters considering the requirements and restrictions for specific applications. According to the algorithms, it is feasible to design a flat field microconcave grating with a 4 mm grating radius as a key component in a micro-Raman spectrometer system for inline environmental monitoring applications. This microspectrometer operates over the spectral wavelength band from 785 nm to 1000 nm and has a spectral resolution of 2 nm at 900 nm. The total size of the system is 1 mm × 4 mm × 3.7 mm, making it one of the smallest for this wavelength range and spectrum resolution.
机译:为了简化微制造凹面光栅的设计过程,开发了用于快速表征凹面光栅的简化算法。考虑到特定应用的要求和限制,这些算法可用于帮助使用光线跟踪软件的系统设计人员确定最佳设计参数。根据这些算法,在微喇曼光谱仪系统中设计用于在线环境监测应用的具有4 mm光栅半径的平面场微凹光栅作为关键组件是可行的。该显微谱仪在785 nm至1000 nm的光谱波长带上运行,在900 nm处的光谱分辨率为2 nm。该系统的总尺寸为1 mm×4 mm×3.7 mm,是该波长范围和光谱分辨率的最小尺寸之一。

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