Flat-field VLS spectrometers for laboratory applications

摘要

Our intention is to develop high-resolution stigmatic spectral imaging in the XUV (2 - 40 nm). We have designed, aligned and tested a broadband stigmatic spectrometer for a range of 12-30 nm, which makes combined use of a normal-incidence multilayer mirror (MM) (in particular, a broadband aperiodic MM) and a grazing-incidence plane varied line-space (VLS) reflection grating. The concave MM produces a slightly astigmatic image of the radiation source (for instance, the entrance slit), and the VLS grating produces a set of its dispersed stigmatic spectral images. The multilayer structure determines the spectral width of the operating range, which may amount to more than an octave in wavelength (e.g. 12.5-30 nm for an aperiodic Mo/Si MM), while the VLS grating controls the spectral focal curve. The stigmatism condition is satisfied simultaneously for two wavelengths, 14 and 27 nm. In this case, the condition of non-rigorous stigmatism is fulfilled for the entire wavelength range. A LiF laser plasma spectrum was recorded in one 0.5 J laser shot. A spatial resolution of 26 µm and a spectral resolution of 900 were demonstrated in the 12.5 - 25 nm range. We also report the design of a set of flat-field spectrometers of Harada type with VLS gratings. VLS gratings were made by e-beam and interference lithography. A technique (analytical + numerical) was developed for calculating optical schemes for writing plane and concave VLS gratings with predefined line density variation.