Real-time heterodyne speckle pattern interferometry using the correlation image sensor

摘要

A real-time method for heterodyne speckle pattern interferometry using the correlation image sensor (CIS) is proposed. The CIS demodulates the interference phase of heterodyned speckle wavefronts pixelwise at an ordinary video frame rate. The proposed method neither suffers loss of spatial resolution nor requires a high frame rate. Interferometers for out-of-plane and in-plane deformation are developed with a 200 X 200 pixel CIS camera. Experimental results confirm that the proposed method realizes real-time imaging of a rough-surfaced object under deformation. The average standard deviations of demodulated phase-difference images for the out-of-plane and in-plane interferometers are 0.33 and 0.13 rad, respectively.