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首页> 外文期刊>Applied optics >Large-core single-mode rib SU8 waveguide using solvent-assisted microcontact molding
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Large-core single-mode rib SU8 waveguide using solvent-assisted microcontact molding

机译:采用溶剂辅助微接触成型的大芯单模罗纹SU8波导

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摘要

This paper describes a novel fabrication technique for constructing a polymer-based large-core single-mode rib waveguide. A negative tone SU8 photoresist with a high optical transmission over a large wavelength range and stable mechanical properties was used as a waveguide material. A waveguide was constructed by using a polydimethylsiloxane stamp combined with a solvent-assisted microcontact molding technique. The effects on the final pattern's geometry of four different process conditions were investigated. Optical simulations were performed using beam propagation method software. Single-mode beam propagation was observed at the output of the simulated waveguide as well as the actual waveguide through the microscope image.
机译:本文介绍了一种用于构造基于聚合物的大芯单模肋波导的新颖制造技术。具有大波长范围内高透光率和稳定机械性能的负型SU8光致抗蚀剂用作波导材料。通过使用聚二甲基硅氧烷压模与溶剂辅助的微接触成型技术相结合来构造波导。研究了四种不同工艺条件对最终图案的几何形状的影响。使用光束传播方法软件进行光学模拟。在模拟波导的输出以及通过显微镜图像的实际波导处观察到单模光束传播。

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